Thermal Actuators



Organic-based thermal bimorph actuators that can be used to manipulate small objects for inspection and general positioning in realistic environmental conditions. 

Biological Sensors



Top view of cell cartridge prototype. A silicon die with electrodes is mounted directly on the PCB and enclosed on the top and sides by a  PDMS part. As the cartridge is lowered into a ZIF socket, the needles pierce septa to form  fluidic interconnects.

Fluidic Devices



Silicon/plastic fluidic coupler to standard capillary tubing. The coupler is fabricated using DRIE technology combined with injection-molded press fittings.

Electrostatic Actuators

Interferometeric scan of .55 micron aluminum doubly-supported beam deformed by  applied voltage.  Structure snaps down at 14.2 V and pops up at 7 V.